Tokyo Electron 2L81-050095-11控制脈沖卡件 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2L81-050095-11 控制脈沖卡件 是一款用于東京電子（TEL）半導(dǎo)體制造設(shè)備中的高精度控制模塊，負(fù)責(zé)產(chǎn)生和管理關(guān)鍵設(shè)備部件所需的脈沖信號，常用于驅(qū)動、定時或同步相關(guān)執(zhí)行元件，是設(shè)備中實(shí)現(xiàn)高效自動化控制的核心組件之一。
一、產(chǎn)品基本信息
| 項(xiàng)目 | 內(nèi)容 |
|---|---|
| 產(chǎn)品名稱 | 控制脈沖卡件（Control Pulse Board） |
| 產(chǎn)品型號 | 2L81-050095-11 |
| 制造廠商 | Tokyo Electron Ltd.（東京電子） |
| 安裝方式 | 插拔式模塊，安裝于控制系統(tǒng)機(jī)架或主板卡槽中 |
二、核心功能
脈沖信號輸出
用于生成可編程脈沖信號，驅(qū)動如步進(jìn)電機(jī)、伺服驅(qū)動器、執(zhí)行器等部件；
控制設(shè)備的啟停、位置移動、切換節(jié)拍等核心動作。
精密定時與同步控制
實(shí)現(xiàn)工藝流程中多個子系統(tǒng)或部件間的動作時序控制；
支持與主控制板協(xié)同完成復(fù)雜的聯(lián)動邏輯控制。
信號隔離與保護(hù)
內(nèi)置電氣隔離結(jié)構(gòu)，防止外部高頻干擾或電壓異常傳入主控系統(tǒng)；
具備基本的過載、過壓保護(hù)功能。
三、典型應(yīng)用場景
涂膠顯影設(shè)備（Coater/Developer）
控制旋轉(zhuǎn)平臺、涂膠臂或顯影機(jī)構(gòu)的精確動作節(jié)拍；
管理氣動或電動閥的開關(guān)脈沖。
晶圓搬運(yùn)系統(tǒng)
控制機(jī)械臂或升降平臺的步進(jìn)動作，實(shí)現(xiàn)精準(zhǔn)傳輸與定位；
協(xié)調(diào)不同工藝站之間的同步運(yùn)行。
工藝過程協(xié)調(diào)控制
用于等離子蝕刻、真空處理或熱處理等系統(tǒng)中的脈沖輸出信號；
提供同步觸發(fā)信號，實(shí)現(xiàn)工藝節(jié)奏精確控制。
英文資料：
TEL Tokyo Electron 2L81-050095-11 Control Pulse Card is a high-precision control module used in Tokyo Electronics (TEL) semiconductor manufacturing equipment, responsible for generating and managing pulse signals required for key equipment components. It is commonly used to drive, timing, or synchronize related actuators and is one of the core components for achieving efficient automation control in equipment.
1、 Basic Product Information
Project Content
Product Name: Control Pulse Board
Product model 2L81-050095-11
Manufacturer Tokyo Electron Ltd
Installation method: Plug in module, installed in the control system rack or motherboard slot
2、 Core functions
Pulse signal output
Used to generate programmable pulse signals to drive components such as stepper motors, servo drivers, actuators, etc;
Control the core actions of equipment such as start stop, position movement, and switching rhythm.
Precise timing and synchronous control
Implement timing control of actions between multiple subsystems or components in the process flow;
Support collaboration with the main control board to complete complex linkage logic control.
Signal isolation and protection
Built in electrical isolation structure to prevent external high-frequency interference or abnormal voltage from entering the main control system;
It has basic overload and overvoltage protection functions.
3、 Typical application scenarios
Coater/Developer
Control the precise movement rhythm of the rotating platform, coating arm, or developing mechanism;
Manage the switching pulses of pneumatic or electric valves.
Wafer handling system
Control the stepping action of the robotic arm or lifting platform to achieve precise transmission and positioning;
Coordinate the synchronous operation between different process stations.
Process coordination and control
Pulse output signals used in systems such as plasma etching, vacuum treatment, or heat treatment;
Provide synchronous trigger signals to achieve precise control of process rhythm.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
GE D20 EME 10BASE-T Digital Control Modu
RADISYS 451558-004 Communication Module
ABB UN0942b-P Programmable Controller
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| SRF3643-4593-7-56C | SC403-001-T2 | SC755A-040-08 |
| SRF3643-4593-7-5-56C | SC403-002-T2 | SC754B-001-01 |
| SRF3643-4533-7-5-56C | SC402-023-TC | SC756B-001-02 |
| SRF3632-5265-84-5-56BC-CU | SC403-002 | SC752A-001-01 |
| SRF3632-5227-84-5-56BC-CU | SC403-013 | SC753A-010-02 |
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