Tokyo Electron 2184-020028-12模擬輸入電子模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
TEL Tokyo Electron 2184-020028-12 模擬輸入電子模塊 是東京電子公司用于半導(dǎo)體制造設(shè)備中的一種功能性電子模塊，專門用于采集來自設(shè)備內(nèi)部傳感器或工藝控制系統(tǒng)的模擬信號（Analog Input），并將其轉(zhuǎn)換為可供主控系統(tǒng)處理的標(biāo)準(zhǔn)信號格式，是晶圓制造設(shè)備控制鏈中的關(guān)鍵一環(huán)。
一、產(chǎn)品基本信息
| 項(xiàng)目 | 內(nèi)容 |
|---|---|
| 產(chǎn)品名稱 | 模擬輸入電子模塊 |
| 型號 | 2184-020028-12 |
| 所屬系統(tǒng) | Tokyo Electron 半導(dǎo)體設(shè)備 |
| 功能類型 | 模擬信號采集與輸入接口 |
二、主要功能
模擬信號采集
接收來自溫度傳感器、壓力傳感器、氣體流量計(jì)、位置反饋器等設(shè)備的連續(xù)模擬電信號（如0–5V、0–10V、4–20mA等）；
模塊內(nèi)部具備A/D轉(zhuǎn)換功能，將模擬信號數(shù)字化，以供控制系統(tǒng)進(jìn)一步處理。
信號隔離與穩(wěn)定輸入
具備電氣隔離能力，有效避免外部信號干擾影響主控系統(tǒng)；
提高系統(tǒng)整體抗噪能力和運(yùn)行穩(wěn)定性。
數(shù)據(jù)上傳與工藝控制支持
將采集到的參數(shù)實(shí)時(shí)上傳至主控制單元，用于閉環(huán)控制邏輯；
可用于聯(lián)動(dòng)執(zhí)行機(jī)構(gòu)實(shí)現(xiàn)動(dòng)態(tài)工藝調(diào)整，如溫控反饋、流量調(diào)節(jié)等。
三、應(yīng)用領(lǐng)域
半導(dǎo)體前道工藝設(shè)備
應(yīng)用于TEL晶圓制造設(shè)備如涂膠顯影設(shè)備（Clean Track）、蝕刻機(jī)（Etcher）、清洗設(shè)備等；
采集工藝關(guān)鍵變量用于實(shí)時(shí)監(jiān)測與控制。
環(huán)境參數(shù)采集系統(tǒng)
安裝于真空腔體、加熱平臺、氣體供應(yīng)單元等設(shè)備部位；
實(shí)時(shí)采集溫度、壓力、氣體流量等模擬量信息。
設(shè)備維護(hù)與診斷
工程師可通過該模塊獲取詳細(xì)工藝參數(shù)，進(jìn)行設(shè)備診斷與調(diào)試；
模塊損壞或老化時(shí)，可更換以恢復(fù)信號鏈路功能。
英文資料：
TEL Tokyo Electron 2184-020228-12 Analog Input Electronic Module is a functional electronic module used by Tokyo Electronics Corporation in semiconductor manufacturing equipment. It is specifically designed to collect analog signals (Analog Input) from internal sensors or process control systems of the equipment, and convert them into a standard signal format that can be processed by the main control system. It is a key link in the control chain of wafer manufacturing equipment.
1、 Basic Product Information
Project Content
Product Name Analog Input Electronic Module
Model 2184-020228-12
Tokyo Electron Semiconductor Equipment System
Function type: Analog signal acquisition and input interface
2、 Main functions
Analog signal acquisition
Receive continuous analog electrical signals (such as 0-5V, 0-10V, 4-20mA, etc.) from temperature sensors, pressure sensors, gas flow meters, position feedback devices, and other equipment;
The module has an A/D conversion function inside, which digitizes analog signals for further processing by the control system.
Signal isolation and stable input
Capable of electrical isolation, effectively avoiding external signal interference affecting the main control system;
Improve the overall noise resistance and operational stability of the system.
Data upload and process control support
Upload the collected parameters in real-time to the main control unit for closed-loop control logic;
It can be used for dynamic process adjustment of linked actuators, such as temperature control feedback, flow regulation, etc.
3、 Application Fields
Semiconductor front-end process equipment
Applied to TEL wafer manufacturing equipment such as coating and developing equipment (Clean Track), etching machines (Etcher), cleaning equipment, etc;
Collect key process variables for real-time monitoring and control.
Environmental parameter collection system
Installed in equipment parts such as vacuum chambers, heating platforms, gas supply units, etc;
Real time collection of analog information such as temperature, pressure, and gas flow rate.
Equipment maintenance and diagnosis
Engineers can obtain detailed process parameters through this module for equipment diagnosis and debugging;
When the module is damaged or aged, it can be replaced to restore the signal link function.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
AMAT 0190-11415 Digital Input Module
| VT-11013-12 | 6DD1682-0BB1 | ICS Triplex T6100 |
| VT 5006 SIX / R5. | 6DD1682-0AJ1 | ICS Triplex T6100C |
| VT 3002-1-2X/48F | 6DD1681-0GA0 | ics triplex T7150a |
| VC3640-450-1-56C | SC453-017-05 | ics triplex t7310 |
| VC3640-449-1-48C | SC452-017-05 | SC953TN-501-01 |
| VC3640-419-1-56C | SC453-037-15 | SC903-050-01 |
| VC3640-405-1-56D | SC453-011-05 | SC933AN-001-01 |
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