LAM 810-328372-002氣體面板 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
LAM 810-328372-002 氣體面板 是泛林半導(dǎo)體（LAM Research）設(shè)備中的一個(gè)關(guān)鍵組件，通常用于半導(dǎo)體制造過(guò)程中的氣體控制系統(tǒng)。該氣體面板能夠精確地控制和分配不同的氣體，以滿足工藝過(guò)程中的嚴(yán)格需求，確保設(shè)備的運(yùn)行穩(wěn)定性和工藝的精確性。
產(chǎn)品特點(diǎn)
氣體分配與控制：
- 該氣體面板提供精確的氣體流量控制，能夠調(diào)節(jié)不同類(lèi)型氣體的供應(yīng)，以確保半導(dǎo)體制造過(guò)程中氣體流量的準(zhǔn)確性和穩(wěn)定性。
- 可以支持多種氣體（如氮?dú)狻⒀鯕?、氫氣、氯氣等）的輸入，并根?jù)工藝要求分配到不同的部件或模塊。
高精度傳感器：
- 配備高精度氣體流量傳感器，實(shí)時(shí)監(jiān)控氣體流量、壓力和溫度等參數(shù)，確保氣體供應(yīng)符合工藝需求。
- 內(nèi)置故障檢測(cè)功能，確保系統(tǒng)在出現(xiàn)異常時(shí)能夠及時(shí)報(bào)警，防止工藝偏差。
模塊化設(shè)計(jì)：
- 緊湊的模塊化結(jié)構(gòu)，便于安裝和維護(hù)，能夠與其他設(shè)備系統(tǒng)（如氣體供給系統(tǒng)、氣體過(guò)濾系統(tǒng)等）無(wú)縫集成。
- 提供易于連接的接口，支持與現(xiàn)有設(shè)備的快速集成。
耐腐蝕材料：
- 采用耐腐蝕、耐高溫的材料制造，確保在高腐蝕性氣體和高溫環(huán)境下穩(wěn)定運(yùn)行。
安全性和保護(hù)功能：
- 內(nèi)置氣體泄漏檢測(cè)和自動(dòng)切斷功能，確保在發(fā)生氣體泄漏或系統(tǒng)異常時(shí)，能迅速停止氣體供應(yīng)并報(bào)警。
英文資料：
The LAM 810-328372-002 gas panel is a critical component in LAM Research equipment, typically used in gas control systems during semiconductor manufacturing processes. This gas panel can accurately control and distribute different gases to meet the strict requirements of the process, ensuring the stability of equipment operation and the accuracy of the process.
Product Features
Gas distribution and control:
This gas panel provides precise gas flow control and can regulate the supply of different types of gases to ensure the accuracy and stability of gas flow in the semiconductor manufacturing process.
It can support the input of multiple gases (such as nitrogen, oxygen, hydrogen, chlorine, etc.) and allocate them to different components or modules according to process requirements.
High precision sensors:
Equipped with high-precision gas flow sensors, real-time monitoring of gas flow rate, pressure, temperature and other parameters to ensure that gas supply meets process requirements.
Built in fault detection function ensures that the system can alarm in a timely manner when abnormalities occur, preventing process deviations.
Modular design:
Compact modular structure, easy to install and maintain, can seamlessly integrate with other equipment systems such as gas supply systems, gas filtration systems, etc.
Provide an easy to connect interface that supports rapid integration with existing devices.
Corrosion resistant materials:
Made of corrosion-resistant and high-temperature resistant materials to ensure stable operation in highly corrosive gases and high-temperature environments.
Security and protection functions:
Built in gas leak detection and automatic shut-off function ensure that gas supply can be quickly stopped and an alarm can be triggered in case of gas leakage or system abnormalities.
2.產(chǎn) 品 展 示
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