Brooks 001-0000-41晶圓索引器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Brooks 001-0000-41 晶圓索引器 是Brooks Automation公司設(shè)計的一款專用于半導(dǎo)體制造和處理中的晶圓定位和搬運設(shè)備。該索引器用于自動化晶圓搬運系統(tǒng)中，通過精確的定位和轉(zhuǎn)動功能，將晶圓傳送到指定的工藝步驟中。其設(shè)計考慮了半導(dǎo)體生產(chǎn)的潔凈度和精度要求，是高效晶圓處理流程中的關(guān)鍵組件之一。
主要特點：
高精度定位：
- Brooks 001-0000-41 晶圓索引器提供了高精度的旋轉(zhuǎn)和定位控制，確保晶圓在各個工藝步驟中的位置準(zhǔn)確。這種精確定位有助于提高生產(chǎn)一致性，減少晶圓在搬運過程中的位置偏差。
- 精密定位功能允許對晶圓進行微調(diào)，以適應(yīng)不同設(shè)備和工藝的需求。
快速響應(yīng)時間：
- 該索引器能夠以極短的響應(yīng)時間進行位置調(diào)整，適合高速度、高產(chǎn)量的生產(chǎn)環(huán)境。它可以在多個工藝步驟之間迅速移動晶圓，提高整個生產(chǎn)線的效率。
耐用性和潔凈度：
- 設(shè)計符合半導(dǎo)體制造的潔凈室標(biāo)準(zhǔn)，材料具有低顆粒產(chǎn)生特性，能夠在潔凈室環(huán)境中長時間運行而不會污染晶圓表面。
- 具有良好的耐用性，能夠承受連續(xù)運行，適應(yīng)半導(dǎo)體制造的嚴(yán)苛環(huán)境要求。
多軸同步控制：
- 索引器配備多軸控制系統(tǒng)，可控制晶圓的旋轉(zhuǎn)、傾斜和精確位置調(diào)整，滿足多樣化的工藝需求。多軸控制特別適合在晶圓檢測、圖案對準(zhǔn)等環(huán)節(jié)中使用。
兼容性和模塊化設(shè)計：
- Brooks 001-0000-41 索引器具有模塊化設(shè)計，可與其他Brooks或第三方自動化設(shè)備兼容。其設(shè)計便于集成到不同品牌和型號的晶圓處理系統(tǒng)中，提升了系統(tǒng)的靈活性。
- 索引器支持多種安裝方式，可以靈活配置在各種設(shè)備中，包括清洗、曝光和蝕刻等設(shè)備。
實時反饋與監(jiān)控：
- 配備傳感器和反饋系統(tǒng)，支持實時監(jiān)控和位置調(diào)整。這種功能允許在運行中對設(shè)備進行自我診斷，減少因故障導(dǎo)致的停機時間。
- 支持與上位控制系統(tǒng)的通信接口，使操作人員可以實時獲取設(shè)備狀態(tài)，及時進行維護。
英文資料：
The Brooks 001-0000-41 wafer index is a wafer positioning and handling equipment designed by Brooks Automation specifically for semiconductor manufacturing and processing. This index is used in automated wafer handling systems to transfer wafers to designated process steps through precise positioning and rotation functions. Its design takes into account the cleanliness and precision requirements of semiconductor production, and is one of the key components in efficient wafer processing.
Main features:
High precision positioning:
The Brooks 001-0000-41 wafer index provides high-precision rotation and positioning control, ensuring the accurate position of the wafer in each process step. This precise positioning helps improve production consistency and reduce positional deviations of wafers during handling.
The precise positioning function allows for fine-tuning of the wafer to meet the needs of different equipment and processes.
Fast response time:
This index can adjust the position with extremely short response time, suitable for high-speed and high-yield production environments. It can quickly move wafers between multiple process steps, improving the efficiency of the entire production line.
Durability and cleanliness:
Designed to meet the clean room standards of semiconductor manufacturing, the material has low particle generation characteristics and can operate for a long time in a clean room environment without contaminating the wafer surface.
Has good durability, can withstand continuous operation, and adapts to the harsh environmental requirements of semiconductor manufacturing.
Multi axis synchronous control:
The indexing device is equipped with a multi axis control system, which can control the rotation, tilt, and precise position adjustment of the wafer to meet diverse process requirements. Multi axis control is particularly suitable for use in wafer inspection, pattern alignment, and other processes.
Compatibility and modular design:
The Brooks 001-0000-41 indexer features a modular design that is compatible with other Brooks or third-party automation devices. Its design facilitates integration into wafer processing systems of different brands and models, enhancing the flexibility of the system.
The indexer supports multiple installation methods and can be flexibly configured in various devices, including cleaning, exposure, and etching equipment.
Real time feedback and monitoring:
Equipped with sensors and feedback systems, supporting real-time monitoring and position adjustment. This feature allows for self diagnosis of the device during operation, reducing downtime caused by malfunctions.
Support communication interface with the upper control system, allowing operators to obtain real-time device status and perform maintenance in a timely manner.
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
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AMAT 0190-11415 Digital Input Module
5.更多庫存型號
| PMB31B-20101-03 | NKMF02-02 | M22NRXC-LDN-NS-00 |
| PMB31B-20101-02 | AMAT 0100-09210 | 57160001-UH DSTD 150 |
| PMB31B-20101-01 | AMAT 0100-20265 | PFRL 101C |
| PMB31B-20101-00 | 07KT93 | P21NSXS-LSS-NS-06 |
| PMB31B-20100-03 | AMAT 0120-93660 | 57160001-PK DSDI 125 |
| PMB31B-20100-02 | PHARPS32000000 | M22NSXB-IDS-NS-02 |
| PMB31B-20100-01 | GJR5250000R0202 | N41HRFL-LNK-NS-00 |
| PMB31B-20100-00 | DOT100 | 57160001-ACX DSDP 140B |
| PMB31B-10216-03 | 07ZE88 | P22NRXA-LDN-HD-00 |
| PMB31B-10216-02 | 07YS80 | P21NRXA-LSS-NS-00 |
| PMB31B-10216-01 | AMAT 0090-A8211 | PXUB201 |
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