Brooks 002-7391-35預(yù)先定位器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Brooks 002-7391-35 預(yù)先定位器 是Brooks Automation專為晶圓處理設(shè)計(jì)的高精度預(yù)定位設(shè)備，主要用于半導(dǎo)體制造和檢測(cè)過(guò)程中晶圓的初步定位，確保在進(jìn)一步的搬運(yùn)和處理之前晶圓達(dá)到最佳的初始位置。它能夠提供精確的晶圓定位和對(duì)齊支持，有助于保證后續(xù)工序中的操作精度。
主要特點(diǎn)：
高精度定位：
- 002-7391-35預(yù)先定位器配備精密的定位系統(tǒng)，能夠在微米級(jí)別對(duì)晶圓進(jìn)行調(diào)整。這種高精度定位確保晶圓在進(jìn)入主要處理流程前已經(jīng)在理想位置，從而減少誤差的累積。
快速對(duì)齊和調(diào)整：
- 設(shè)備設(shè)計(jì)具有快速調(diào)整功能，能夠迅速完成晶圓的對(duì)齊與初始定位，幫助生產(chǎn)線提高整體速度和效率。對(duì)于需要高吞吐量的生產(chǎn)環(huán)境，它能夠提供短暫的對(duì)齊時(shí)間而不犧牲精度。
靈活的兼容性：
- 預(yù)先定位器能夠兼容不同尺寸的晶圓以及多種類型的搬運(yùn)和處理設(shè)備，適應(yīng)各種自動(dòng)化流程的需求。這一靈活性使其可以集成到不同的半導(dǎo)體制造生產(chǎn)線中，提升系統(tǒng)的適應(yīng)性。
潔凈室兼容：
- 002-7391-35符合潔凈室的高標(biāo)準(zhǔn)要求，采用低顆粒材料和低污染設(shè)計(jì)，以確保在無(wú)塵環(huán)境中安全操作，避免晶圓受到污染影響其質(zhì)量。
可靠的結(jié)構(gòu)設(shè)計(jì)：
- 該定位器采用堅(jiān)固的結(jié)構(gòu)，保證其在連續(xù)工作環(huán)境中的穩(wěn)定性和耐用性，適合長(zhǎng)時(shí)間高負(fù)荷的半導(dǎo)體生產(chǎn)和檢測(cè)流程。設(shè)備結(jié)構(gòu)設(shè)計(jì)還便于維護(hù)，降低了運(yùn)維成本。
智能監(jiān)控與反饋系統(tǒng)：
- 預(yù)定位器配有智能監(jiān)控系統(tǒng)，實(shí)時(shí)反饋設(shè)備的定位狀態(tài)和精度，確保晶圓在進(jìn)入下一環(huán)節(jié)前符合要求。若發(fā)生定位偏差或異常，系統(tǒng)會(huì)立即提醒操作人員，保證生產(chǎn)的高質(zhì)量和一致性。
英文資料：
The Brooks 002-7391-35 pre positioning device is a high-precision pre positioning equipment designed by Brooks Automation specifically for wafer processing. It is mainly used for preliminary positioning of wafers in semiconductor manufacturing and testing processes, ensuring that the wafers reach the optimal initial position before further handling and processing. It can provide precise wafer positioning and alignment support, helping to ensure operational accuracy in subsequent processes.
Main features:
High precision positioning:
The 002-7391-35 pre locator is equipped with a precise positioning system that can adjust wafers at the micrometer level. This high-precision positioning ensures that the wafer is in the ideal position before entering the main processing flow, thereby reducing the accumulation of errors.
Quick alignment and adjustment:
The equipment design has a quick adjustment function, which can quickly complete wafer alignment and initial positioning, helping the production line improve overall speed and efficiency. For production environments that require high throughput, it can provide brief alignment time without sacrificing accuracy.
Flexible compatibility:
The pre locator is compatible with wafers of different sizes and various types of handling and processing equipment, adapting to the needs of various automation processes. This flexibility allows it to be integrated into different semiconductor manufacturing production lines, enhancing the adaptability of the system.
Cleanroom compatibility:
002-7391-35 meets the high standard requirements of cleanrooms, using low particle materials and low pollution design to ensure safe operation in a dust-free environment and avoid wafer contamination affecting its quality.
Reliable structural design:
The locator adopts a sturdy structure to ensure its stability and durability in continuous working environments, suitable for long-term high load semiconductor production and testing processes. The equipment structure design is also easy to maintain, reducing operation and maintenance costs.
Intelligent monitoring and feedback system:
The pre locator is equipped with an intelligent monitoring system that provides real-time feedback on the positioning status and accuracy of the equipment, ensuring that the wafer meets the requirements before entering the next stage. If there is a positioning deviation or abnormality, the system will immediately remind the operator to ensure high quality and consistency of production.
2.產(chǎn) 品 展 示
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5.更多庫(kù)存型號(hào)
| PMB31B-10201-00 | 07ZE63R302 | P22NRXA-LNF-NS-00 |
| PMB31B-10200-03 | AMAT 0100-01488 | 57160001-TZ DSTD 110 |
| PMB31B-10200-02 | AMAT 0100-03133 | PFTL301E 0.2KN 3BSE019050R200 |
| PMB31B-10200-01 | 07EB200 | P21NRXA-LSS-NS-02 |
| PMB31B-10200-00 | NPSI02 | M22NRXB-LDN-NS-00 |
| PMB31B-10116-03 | NKAS11 | M22NRXB-LNN-NS-00 |
| PMB31B-10116-02 | AMAT 0100-91085 | PFTL201CE 10.0KN |
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