Brooks TT1ENR2-1-TVS-ES機(jī)器人控制器 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Brooks TT1ENR2-1-TVS-ES 機(jī)器人控制器 是Brooks Automation為半導(dǎo)體和高科技制造行業(yè)設(shè)計的高精度控制器，專門用于管理和控制晶圓搬運(yùn)機(jī)器人的運(yùn)動。該控制器支持復(fù)雜的運(yùn)動編程，能夠高效控制機(jī)器人實現(xiàn)精確的晶圓搬運(yùn)和定位。Brooks TT1ENR2-1-TVS-ES控制器通常配合Brooks系列晶圓傳輸機(jī)器人使用，以確保生產(chǎn)過程的穩(wěn)定性和精確性。
主要特點(diǎn)：
精確的運(yùn)動控制：
- TT1ENR2-1-TVS-ES控制器采用先進(jìn)的運(yùn)動控制算法，能夠?qū)崿F(xiàn)多軸同步控制，確保機(jī)器人在復(fù)雜路徑下的精準(zhǔn)運(yùn)動。它可以控制機(jī)器人以微米級的精度進(jìn)行定位，以適應(yīng)半導(dǎo)體制造中對精度的高要求。
高效的響應(yīng)速度：
- 控制器具備快速響應(yīng)能力，可以實時調(diào)整機(jī)器人的位置和速度。這一特性在需要高效率的生產(chǎn)環(huán)境中尤為重要，能夠減少搬運(yùn)周期，提高生產(chǎn)線的整體效率。
模塊化與靈活性：
- 設(shè)計上采用模塊化結(jié)構(gòu)，便于集成到不同類型的自動化系統(tǒng)中。該控制器可以與不同型號的Brooks機(jī)器人兼容，并能夠根據(jù)生產(chǎn)需求進(jìn)行配置，使其在多種生產(chǎn)環(huán)境中具有高度適應(yīng)性。
潔凈室兼容設(shè)計：
- 該控制器符合半導(dǎo)體潔凈室的嚴(yán)格要求，具備低顆粒排放的特性，適用于無塵生產(chǎn)環(huán)境中運(yùn)行，確保在敏感的制造環(huán)境中不會污染晶圓表面。
智能監(jiān)控與診斷功能：
- 配備自診斷和智能監(jiān)控系統(tǒng)，可以實時檢測運(yùn)行狀態(tài)并提供反饋信息，便于運(yùn)維人員及時監(jiān)控和維護(hù)。若控制器檢測到異常情況，可以自動調(diào)整并發(fā)出報警，防止故障擴(kuò)大。
支持多種通信接口：
- Brooks TT1ENR2-1-TVS-ES控制器支持多種工業(yè)通信協(xié)議，包括Ethernet、RS-232、RS-485等，方便與上位機(jī)或工廠信息系統(tǒng)進(jìn)行連接和數(shù)據(jù)傳輸，實現(xiàn)集中控制和數(shù)據(jù)管理。
安全功能：
- 配備多層安全機(jī)制，如過載保護(hù)、緊急停止和自動恢復(fù)等功能，確保機(jī)器人在運(yùn)行過程中不會對設(shè)備或晶圓造成損傷。該安全功能特別適用于高價值的晶圓搬運(yùn)過程，降低了生產(chǎn)風(fēng)險。
英文資料：
The Brooks TT1ENR2-1-TVS-ES robot controller is a high-precision controller designed by Brooks Automation for the semiconductor and high-tech manufacturing industries, specifically designed to manage and control the motion of wafer handling robots. This controller supports complex motion programming and can efficiently control robots to achieve precise wafer handling and positioning. The Brooks TT1ENR2-1-TVS-ES controller is typically used in conjunction with the Brooks series wafer transfer robots to ensure stability and accuracy in the production process.
Main features:
Accurate motion control:
The TT1ENR2-1-TVS-ES controller adopts advanced motion control algorithms, which can achieve multi axis synchronous control and ensure precise motion of the robot in complex paths. It can control robots to position with micrometer level accuracy to meet the high precision requirements in semiconductor manufacturing.
Efficient response speed:
The controller has fast response capability and can adjust the position and speed of the robot in real time. This feature is particularly important in production environments that require high efficiency, as it can reduce handling cycles and improve the overall efficiency of the production line.
Modularity and flexibility:
The design adopts a modular structure, which facilitates integration into different types of automation systems. This controller is compatible with different models of Brooks robots and can be configured according to production needs, making it highly adaptable in various production environments.
Cleanroom compatible design:
This controller meets the strict requirements of semiconductor cleanrooms, has low particle emissions, and is suitable for operation in dust-free production environments, ensuring that the wafer surface will not be contaminated in sensitive manufacturing environments.
Intelligent monitoring and diagnostic functions:
Equipped with self diagnosis and intelligent monitoring system, it can detect the operating status in real time and provide feedback information, making it easy for operation and maintenance personnel to monitor and maintain in a timely manner. If the controller detects an abnormal situation, it can automatically adjust and issue an alarm to prevent the fault from expanding.
Supports multiple communication interfaces:
The Brooks TT1ENR2-1-TVS-ES controller supports multiple industrial communication protocols, including Ethernet, RS-232, RS-485, etc., making it easy to connect and transmit data with the upper computer or factory information system, achieving centralized control and data management.
Security function:
Equipped with multiple layers of safety mechanisms, such as overload protection, emergency stop, and automatic recovery, to ensure that the robot will not cause damage to equipment or wafers during operation. This security feature is particularly suitable for high-value wafer handling processes, reducing production risks.
2.產(chǎn) 品 展 示
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5.更多庫存型號
| PMB31B-10216-03 | 07ZE88 | P22NRXA-LDN-HD-00 |
| PMB31B-10216-02 | 07YS80 | P21NRXA-LSS-NS-00 |
| PMB31B-10216-01 | AMAT 0090-A8211 | PXUB201 |
| PMB31B-10216-00 | AMAT 0100-00010 | 57160001-UNC DSTD 150B |
| PMB31B-10214-03 | IMASI23 | 3BSE003912R1 RF541 |
| PMB31B-10214-02 | AMAT 0100-00013 | PFTL101B 2.0KN 3BSE004185R1 |
| PMB31B-10214-01 | IEFAN01 | 57160001-ADF DSDP 170 |
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